田中秀治研究室 ~Student Page~

Collaboration with Miura Lab (C-Lab Training)

Dear Tanaka Lab’s student blog reader,

guten tag aus Deutschland!

This is Salman, an M1 student currently visiting Fraunhofer ENAS in Germany. Although I am in Germany, this time I would like to write about another thing, that is my experience in collaborating with another laboratory in Tohoku University.

Since April 2016, I am enrolled as a student of the Inter-Graduate School Doctoral Degree Program on Science for Global Safety (G-Safety), Leading Graduate School Program. This program requires me and the other enrolled students to perform a project with the other laboratory, which is called Convergence Laboratory Training (C-Lab). The project can also actually be found in Mechanical Engineering division under the title of Frontier of Mechanical Engineering (機械工学フロンティア). In this project, I actually joined 2 programs, but I will report only one here, with relation to our laboratory.

I joined a project with Miura Laboratory’s students. We started the project in May 2016 by discussing about what we will do. Compared to Miura Lab, our laboratory is very strong in sample fabrication, because to make a single MEMS (or even to demonstrate a single packaging technology), we need to undergo a long fabrication process, which consists of various processes. And often we found some failure in our process which makes us have to redo the processes. This trial and error process taught us how the real micro-fabrication process is.

On the other hand, compared to our lab, Miura Lab is very strong in the evaluation technology for materials. Their typical research is to deposit a material using a specific technology, and evaluate various properties in correspondence with different deposition parameters. Every student in Miura Lab masters an evaluation technology deeply.

We finally decided to study the property of electroplated gold (Au), since gold has never been studied in Miura Lab, and used it as a material for MEMS packaging in my research. Then we evaluate it using the specialties of each 4 Miura Lab’s student.

This was a good collaboration since I have no any basic about the evaluation technology for thin-film properties before (which they are very strong). And they didn’t know anything about Au electroplating. So all of us learn a lot from this project.

So after doing Au electroplating and apply some annealing variation, we evaluated the film using nano-indentation test, electron backscatter diffraction (EBSD) and micro-tensile test. I learned from the basics of these evaluation methods and see the real experiments. I performed the real experiments only for the EBSD.

Nano-indentation test and EBSD are conventional technologies, which is actually used by almost all materials researcher. Nano-indentation test is used to measure the Young’s modulus and hardness of a thin film and EBSD is used to evaluate the crystal orientation and size on a surface of a material. However, the micro-tensile test is a novel technology. It is used to evaluate the strength of grain or grain boundary. In my opinion, although the principle does not looks so complicated, the fabrication of the test sample is very difficult. Everything is put inside a focused ion beam (FIB) machine and patterned using ion beams. Quite unbelievable. Even the test itself is done inside the FIB machine and takes around 1 full day for 1 sample making until the test (all inside the same FIB machine), regardless it is successful or not.

Finally I used some of the knowledge obtained from this training for my research. That is using EBSD to analyze the grain boundary of the surface resulted by the fly-cutting process, and presented the result in an international workshop.

The international workshop is titled the 2nd USTB-TU Joint Workshop on Advanced Materials and Manufacture, held at the University of Science and Technology Beijing (USTB), China, on 21-24 February 2017. It is a joint workshop by the Fracture and Reliability Research Institute of Tohoku University and the Collaborative Innovation Center of Steel Technology of the USTB. The workshop is done for both fostering the collaboration between 2 institutes, as well as to give students an opportunity to practice giving presentation in an international environment. Each student was given a slot for oral presentation as well as poster session. Maybe it is also good to have such kind of joint workshop in our lab for practice. In this workshop, I was surprised that the students from Miura Lab are B4 students. They have been given such good opportunity from a very young age.

For me, it was a practice in giving presentation to people from different background and research interest. As you may guess from the title of the workshop, the main interest of the people there is the materials and manufacturing technologies. I think there were only a few people in the workshop who has ever heard about the term “MEMS” before. So I need to somehow modify my talk. And I also learned a lot about evaluation technologies for material properties.

Here I would like to share some photos:

Tesla's electric car

A typical road on a typical day in Beijing. The sky in Beijing is not blue due to the high amount of pollution mainly from industries and transportation. Let us protect our environment!

Tesla's electric car

But fortunately the sky was blue during the day for excursion! As one of the destination, we visited the Palace Museum. Chinese students must know who this guy in the photo is!

Tesla's electric car

The roof of the temple is very artistic!

Before ending this post, I would like to thank the G-Safety program, which made this collaboration possible. I would also acknowledge Tanaka-sensei and Hirano-sensei for their guidance in my research. Also thanks to Kaneko-san for introducing me to this G-Safety program. Then the last but not the least, I would like to thank Miura-sensei and his lab members who have provided me the opportunity to learn something new.

And finally I would like to close this post with a quote:

“‪For young researchers, don’t be too focused on your field. You should read other field’s literature, hear and discuss with other field’s researchers. Maybe the idea will come from other fields.”
- Prof. Jean-Pierre Sauvage -
(Nobel Laureate in Chemistry 2016)
at the Nobel Prize Dialogue Tokyo 2017: The Future of Intelligence


Greeting & Sweets from Germany

Hello everyone,

I’m Koki Tanaka, a D3 student. I’m going to leave Tohoku University in next March.

Today, we have a greeting and wonderful sweets from Vogel-san, Germany.
He had stayed S. Tanaka laboratory several years ago, as a researcher from Fraunhofer ENAS.

A letter and Germany sweets from Vogel-san!!

We are very happy to receive the greeting and sweets from you.
How is your life and researching? We hope everything is going well.

Shao-san with the sweets. He looks very happy, good smile.

In this period, it seems that some students are quite busy.
In contrast, I’m not so nervous, because my final-defense had already finished.

Kaneko-kun (left-side) and Asano-kun (right-side). Both are doctoral student, so quite busy now. However, they will be relaxed by the sweets...

Some other students are preparing the farewell party.
We have been given some hand-made gifts for graduates.

Teranishi-kun. It seems that he is polishing something for the gifts, even though he has to make a bachelor’s thesis... Thanks!

Above is current situation of S. Tanaka laboratory.
I’d like to upload this article as a greeting from Japan!

Best regards,
Koki Tanaka


田中(秀)研究室における研究 2017



MEMSとは、Micro Electro Mechanical Systemsの略で、簡単に言えば電気で動くとても小さなデバイスです。身近な例として、スマートフォンやゲーム機の加速度センサ、スマートフォンのマイクロフォンなどがあります。MEMSは機械、電気、光、熱、材料など、さまざまな分野を融合し、半導体微細加工技術により製作されます。自動車、通信、ロボティクス、バイオ、医療福祉、インフラ保全、エネルギーなど、アプリケーションも多岐にわたっています。現在ホットな話題である自動運転技術やInternet of Things (IoT)、人工知能やディープラーニングの実用化においてもMEMS技術によるセンサは不可欠であり、盛んに研究開発されています。田中(秀)研究室では、最先端のMEMSの試作開発や、そのための装置開発、材料開発、さらにMEMSを使用したシステム開発など、多彩な研究を行っています。



 A. 触覚センサ・システム集積化グループ (室山准教授)

 B. パッケージング・実装プロセスグループ (平野助教)

 C. 圧電材料・デバイスグループ (吉田特任准教授)

 D. 弾性波デバイスグループ (門田特任教授)

 E. ジャイロセンサ・熱・バイオセンサグループ (塚本助教)

 F. 先端材料デバイスグループ(Fraunhofer ENASとの連携)(Froemel准教授)



理由その1 相談会・談話会

理由その2 教えあう風習

理由その3 オープンな間取り
また、教授室もドアはNormally open となっています。相談があるときは気兼ねせずに入っていけます。


学生ブログ 学会発表体験記






Year end party 2016








追いコンから始まり、IEEE-NEMS 2016(>>http://ieee-nems.org/2016/)やオープンキャンパス、季節のイベントなど、様々な行事がありました。研究だけではなく、様々なイベントをスタッフ・学生一緒に楽しむことができるのはとても素晴らしいですね。











Hello everyone, this is Sun Tong, a M2 student.

The SEMICON JAPAN 2016 was held in Tokyo Big Sight on 14-16 December, Tokyo. It is one of the largest international exhibition of semiconductor industry in the world. As an exhibitor, Tanaka Lab had a booth in the World of IOT (Internet of Thing) area, which was prepared by staffs. Besides staffs, six students from our lab also got the great opportunity to attend this event on 14 Dec, including Shao-san(D2), Nishino-san (D1), Kaneko-san(D1), salman-san(M1), Morimura-san(B4) and me.

Tokyo Big Sight

Our student group got together in Sendai Station at around 7am and took the Yamabiko train to the Tokyo. We arrived at Tokyo Big Sight at about 10 am. The SEMICON already started and crowds of people was flowing into the site. Following with people stream, we entered the site.

The exhibition area was mainly separated into 2 parts: Front-end Process Zone and Back-end/Materials & Overall Process Zone. More than 600 high-level industrial companies and laboratories from all over the world gathered there. Bringing their latest technologies and productions, they made presentations and demonstrations to attract potential collaborators. Apart from that, several small but special zones were also set in this exhibition such as World of IOT zone which focused on IOT system/solution and Mirai College Corner which provided a communication platform for job hunting students and companies.

It was the first time for me to attend such a big scale industrial fair and it broadened my horizon. Those latest technologies and productions really impressed me. Hitachi exhibited their NEXTAGE, which is a humanoid dual arm industrial robot. 4 cameras and image recognition technique help it to recognize surroundings and positions in 3D so that it can work next to people. Toyota exhibited their latest FCV (fuel cell vehicle) Mirai. Comparing to internal-combustion engine, the eco-car has higher energy conversion efficiency. And what’s more, it uses Oxygen and Hydrogen as fuel so that no exhaust gas will be generated.

Tanaka Lab’s booth was located in World of IOT corner, which was managed by Takoshima-san. Several posters showed Tanaka Lab’s research fields and achievements to visitors. And Hirano-sensei gave a great seminar titled “Wafer-level heterogeneous integration using metal bonding based technology” in STS MEMS/Sensor Session at TechSTAGE INNOVATION&IOT area.

Takoshima-san was introducing Tanaka Lab to the president of Sumitomo Precision Products Co., Ltd.

Group photo of students

And finally, we would like to thank our sponsor, SEMICON Mirai-College, who has provided we return travel expenses from Sendai to Tokyo.