田中秀治研究室 ~Student Page~

Sakura Plan 2018.8.28

By JiaNing Liang(M2)

This article is about the Sakura-Science plan which was held in August 28.
At first, I would like to show my sincere appreciation to Prof. Satoshi Kato who explained Tohoku University Archive and Lu Xun’s Lecture Room. And of course Tanaka-sensei, Chinese students in our lab and every one who take part in the party. Honest respect to every staff who helped us.

The light rain can never hinder the passion of us.
Prof. Satoshi Kato precisely explained the Tohoku University Archive and the biography of Lu Xun, who is one of the most Influential writer and thinker in China. Everyone hold the breath to listen this excellent illustration.


After that, we move to the classroom made by the wool. It is almost a miracle for it to break through the war and smoke, still standing here like nothing happened. Smelling the scent of ink and history, we feel like travelling across the time. The first university welcoming foreigners in Japan, the great place for giant coming up with the idea. Everyone got the chance to write down the name and experience on the note, and it will preserve forever.


Tanaka sensei made the impressive MEMS lecture. I would like to say that every time I concentrate on the lecture, I got deeper comprehension, also some kinds of skill for making the speech. Science is no doubt a fascinating one, making every curious guy soak in the ocean of knowledge. Whether you could swim or not, you have the rights to enjoy.


We take the students to the Cleanroom and MNC 2th 3th floor. Some of them ask the details of the machine. Yeah, it means they have the interest in MEMS and we feel happy about that.


Now it is lunch time. We enjoyed such kind of rich food. In case of my point of view, the fruit is amazing delicious. The professors, staffs, students in our lab made introductions of ourselves. Students in Sakura plan also introduced themselves. We shared our experience, idea and life. This is the best moment of today. Peace and love.


Finally, Tanaka-sensei send them to the Nishizawa center. I understand some of them even have made the decision to work hard, taking the chance to join our lab.

What a memorable day.



Hallo, this is Moriyama.

私は6月24日から27日まで香港科技大学(HKUST)にて開かれたAPCOT(Asia Pacific)2018に参加し、発表を行いましたので、報告いたします。
I went to HKUST in Hong Kong from 24th to 26th June because of attendee and presentation in APCOT2018.

各日の初めにはKeynote speechとして、MEMSにおける著名な先生方の講演があり、その後の各セッションでは、中国、日本、韓国、台湾をはじめとした各国の大学の研究者、学生から発表がありました。また、企業の方からの報告も数件ありました。
Every day, the first speaks are Keynote Speech of The Prof. in MEMS.
And then, the researchers were speaking them research such as the microphone, sensor for IoT, actuator, and so on.
The researcher’s countries are 15, the reports are 157 paper in Asia area and so on.
In conference, The Chinese researchers are very aggressive.

私はRF-MEMS(高周波微小電気機械システム)のスイッチ向けのパッケージング法の報告をしてきました。発表題目は、”Isolation Characteristics of In-plane Feedthrough across Au/SiOx Seal Ring for Wafer-level RF MEMS Packaging” です。
I reported my research for RF-MEMS packaging.
The title is "Isolation Characteristics of In-plane Feedthrough across Au/SiOx Seal Ring for Wafer-level RF MEMS Packaging".
I attended and talked first time in international conference. Therefore, to be good at speaking English, I had to practice.

It is very important to present my research results at international conferences. Because it is important to know my research to the world widely and to make effective use of it.

所で、Keynote Speechでは150人位聴講者が居たはずですが、私のセッションでは2-30人くらいでした。他のセッションも2-30人位しか居なかったという事で、その他100人ほどの人は何処へ行ったのでしょうか(笑)?昼食時会場には150人位居るんですよね、不思議です。

It is unforeseen meeting in international conference.
I met Dr. Min Wan who is the alumna of Tanaka lab. in APCOT2018.
She is now working for research associate in Southern University of Science and Technology of China.
She has the clean room of 90 m2 which has the sputtering machine, dry etching machine, thickness measurement system, and so on. But it has not the Deep-RIE so she has difficulty doing her fabrication.

27日午後は、HKUSTのNanosystem Fabrication Facility (clean room, (http://www.nff.ust.hk))を見学致しました。
On 27th afternoon, I attended the lab tour of the Nanosystem Fabrication Facility (NFF) in HKUST.
It is only clean room in HKUST.
The NFF is open to many users regardless of internal (2000 researchers) and/or outside(6 companies) such as Hand-on-Access Fab (Shisaku Coin Laundry).
It has the same equipment by two. One is for semiconductor fabrication use, other is for MEMS fabrication use.




その後、香港空港で両替を行い、香港空港からの移動で乗車するAirportExpress、MTR(地下鉄)、バス、お店などで使用できる電子マネー「八達通(Octpus)」をHK$250(デポジットHK$50含む)で買います。香港空港からはAirport Expressで香港駅まで移動し、MTRに2回乗り換え、将軍澳(通しの場合110HDK)まで行きました。

ホテルはHollyday Inn Kowloon Eastで、4星ホテルです。が、4つ星?という感想です。


ホテルは駅と直結で、Ground Floor、1階、2階がショッピングモールになっており、その中に7-11やAEONが入っており、日本の物がお菓子、飲み物、日用品問わずおいてあり、ホッとします。これらの店以外でも、日本(日本語)の物が当然のように売っています。(ショッピングモール内の食事できる場所は多くあったのですが、一人でいる人が全くなく、なんか入りづらかったので仕方なく4泊中3泊の夕食が7-11のパンとつまみ…)








Hello everyone, we're Nara, Ebihara and Matsumoto, B4 students. In this article we will report about recent Welcome Party.



We used a stylish dining bar for the Party.
This year, five B3 students come to Tanaka's Lab.


We're happy because many laboratory members joined this party, even though it was raining.



The Party started with a toast of Professor Tanaka.


I think that it was an opportunity to talk a lot with people who usually have little exchange.


By newcomers, self-introductions were made.


we had a good time!



Finally, I would like to thank the people who gave me cooperation and advice and everyone who participated.


お花見 2018



MEMS 2018 Conference

By Chenzhong Shao (D3)

The 31st MEMS conference was held in Belfast, Northern Ireland, UK, from January 21st to 25th, 2018. Flying from Sendai to Belfast was not an easy task for me. Due to lack of experience, I booked 3 aircrafts which are from Sendai to Seoul, from Seoul to London and from London to Belfast. Among them, the flight from Seoul to London took 12 hours. Staying in a plane for such a long time made me feel very uncomfortable. Fortunately, in-flight meals were delicious.

In-flight meal

The place I lived in Belfast was an apartment booked through Airbnb. When I arrived in Belfast at 9am January 21st, the hospitable host came to pick me up, showed me around and let me check in 5 hours before the schedule. After sleeping several hours, I had to get up to go to the conference location for completing my volunteer assignments in the evening to receive the Student Travel Support provided by the Transducer Research Foundation. My assignment was checking badges in Welcome Reception. My partner in the assignment came from the laboratory in which Hayasaka-san is studying, which was such a coincidence. After the assignment, I went back to the apartment immediately, but jet lag made it difficult for me to fall asleep.

Welcome Reception held in Belfast City Hall

In January 22nd, the presentation part of the 31st MEMS conference started. The conference was held in the Belfast Waterfront which was voted the second best conference centre in the world in the Apex Awards in 2002. I spent most of my time in this nice building during the next 3 and half days, and learned a lot, not only the specific knowledge, but also the way how the top researchers in the field make their presentation. This conference greatly broadened my horizons.

Belfast Waterfront (the left bottom and the right pictures are provided by Prof. Yutaka Nonomura)

In this conference, Prof. Shuji Tanaka was announced to be elected to IEEE fellow. Congratulations!

Announcement (this picture is provided by Prof. Yutaka Nonomura who has a very nice camera)

On the evening of January 24th, we had a Conference Banquet in the Titanic Belfast. Belfast city is famous for building the RMS Titanic ship. The Titanic Belfast tells the stories of the ill-fated Titanic, which hit an iceberg and sank during her maiden voyage in 1912. However, at that time, I was very sleepy and cannot enjoy the banquet. Such a pity.

Conference Banquet in Titanic Belfast

During the conference, I also walked around near the conference location. Belfast is a very compact city which you can traveled around on foot. The host of my apartment likes this city very much, so do I. This city is perfect for running, and it is really dark before 8am and after 4pm in winter.

After 5 days' stay in Belfast, I had to say goodbye to this beautiful and peaceful city. Joining this conference was a wonderful journey and experience for me. I will come back to this city in a summer.

Belfast city


MEMS has evolved over three decades meanwhile, starting from the automotive field, via applications in the consumer electronics area and the Internet-of-Things, and most recently into medical and molecular diagnostic applications [1].

In the consumer electronics area, I listened to a presentation in which a new type of switchable liquid shutter was proposed for the security and design of mobile devices [2]. The operation of the shutter is achieved by shifting an opaque liquid (conductive) and a transparent ambient liquid (insulating), based on electrowetting-on-dielectric (EWOD) actuation. In this device, patterned ITO was used as electrodes. They used Parylene-C and Cytop as the insulating layer and the hydrophobic layer, respectively. PMMA spacers were used to form the liquid chamber, and the periphery of the chamber was sealed using UV-curing resin for hermetic packaging. The response time of the liquid shutter is found to be 600 ms and 350 ms for opening and closing the shutter, respectively at 70 Vrms. The operation of the liquid shutter mounted on a smartphone was successfully demonstrated, as a proof of concept.

As for the medical diagnostic application, I listened to a presentation about an innovative integrated microfluidic platform which allows an ultra-rapid detection of mycotoxins [3]. The simultaneous detection of aflatoxin B1 (AFB1), deoxynivalenol (DON) and ochratoxin A (OTA), within their respective regulatory limits is achieved in a single step within 60 s, by combining an array of thin-film photosensors (a-Si:H photodiode) and a disposable microfluidic device. The microfluidic devices were fabricated using standard PDMS mold replication techniques. This platform can potentially be the basis of portable tools allowing routine and cost-effective on-site screening of mycotoxin contamination by non-specialized personnel.

Microdroplet-based systems provide low-cost and high-throughput biological assays or medical diagnosis. The speaker of a presentation demonstrated, for the first time, microdroplet generation, transport and merging inside a synthetic microfluidic paper (SMP) substrate consisting of a three-dimensional porous matrix [4]. The free-standing SMP was fabricated in an Off-Stoichiometry-Thiol-Ene (OSTE) polymer. Slanted and interlocked micropillar structures in SMP were formed in the OSTE by 4-directional lithography by reflecting vertically collimated UV light to angles of 60° using 4 aluminum mirrors. This work introduces a new platform for the microfluidic generation and manipulation of droplets in paper.

Today MEMS innovation happens mainly on the system and product level [1]. In this conference, I found some technology innovation in the consumer electronics area and in the medical diagnostic application which are away from classical silicon MEMS sensors.

[1] F. Laermer, MEMS, pp. 237-240, 2018.
[2] J. Lee et al., MEMS, pp. 14-16, 2018.
[3] R. R. G. Soares et al., MEMS, pp. 6-9, 2018.
[4] H. Yasuga et al., MEMS, pp. 269-271, 2018.